diff --git a/commands/ash/Makefile b/commands/ash/Makefile
index 77a288b7c..12e5fa343 100644
--- a/commands/ash/Makefile
+++ b/commands/ash/Makefile
@@ -42,8 +42,8 @@ CPPFLAGS+=${EDIT} ${NO_PATHS_H} ${NO_JOBS}
 
 .PATH:	${.CURDIR}/bltin
 
-CLEANFILES+= mkinit mkinit.o mknodes mknodes.o \
-	mksyntax mksyntax.o mksignames mksignames.o
+CLEANFILES+= mkinit mkinit.lo mknodes mknodes.lo \
+	mksyntax mksyntax.lo mksignames mksignames.lo
 CLEANFILES+= ${GENSRCS} ${GENHDRS} y.tab.h
 
 build-tools: mkinit mknodes mksyntax mksignames
diff --git a/drivers/ramdisk/Makefile b/drivers/ramdisk/Makefile
index f28f7c59a..d0a6e58fe 100644
--- a/drivers/ramdisk/Makefile
+++ b/drivers/ramdisk/Makefile
@@ -29,7 +29,7 @@ PROG_DRIVERS+= acpi
 
 CPPFLAGS+= -I${NETBSDSRCDIR}/servers
 CLEANFILES += $(PROGRAMS) $(SCRIPTS) $(EXTRA) image image.c t proto.gen
-CLEANFILES += $(LIBRARIES) pwd.db spwd.db
+CLEANFILES += $(LIBRARIES) pwd.db spwd.db passwd
 
 image:	proto.gen mtab rc $(EXTRA) pwd.db spwd.db passwd
 	${TOOL_MKFSMFS} image proto.gen || { rm -f image; false; }
diff --git a/lib/libc/compat-minix/Makefile.inc b/lib/libc/compat-minix/Makefile.inc
index 31a50051e..b5083f9bd 100644
--- a/lib/libc/compat-minix/Makefile.inc
+++ b/lib/libc/compat-minix/Makefile.inc
@@ -32,6 +32,7 @@ ASM=	compat__opendir230.S compat__alphasort30.S compat__ctime50.S \
 	compat__updlastlogx50.S compat__updwtmpx50.S compat__utime50.S \
 	compat__vfork14.S
 SRCS+=	${ASM}
+CLEANFILES+=	${ASM}
 
 .include "../generateasm.mk"
 
diff --git a/lib/libminc/Makefile b/lib/libminc/Makefile
index 8e404a5a4..e93e76577 100644
--- a/lib/libminc/Makefile
+++ b/lib/libminc/Makefile
@@ -77,6 +77,7 @@ CPPFLAGS.${i}+= -I${LIBCSRCDIR}/stdlib -I${LIBCSRCDIR}/include
 errlist.c: ${LIBCSRCDIR}/gen/errlist.awk \
 	   ${NETBSDSRCDIR}/include/sys/errno.h
 	cat ${NETBSDSRCDIR}/include/sys/errno.h | ${TOOL_SED} 's/(_SIGN//' | ${TOOL_AWK} -f ${LIBCSRCDIR}/gen/errlist.awk > ${.TARGET}
+CLEANFILES+=	errlist.c
 
 .for i in assert.c _errno.c errno.c _env.c errlist.c \
 	execle.c getprogname.c sleep.c time.c \
diff --git a/lib/libutil/compat-minix/Makefile.inc b/lib/libutil/compat-minix/Makefile.inc
index b40d98baa..ceb427b46 100644
--- a/lib/libutil/compat-minix/Makefile.inc
+++ b/lib/libutil/compat-minix/Makefile.inc
@@ -3,5 +3,6 @@ ASM=	compat__login_getpwclass50.S compat__login50.S compat__loginx50.S \
 	compat__pw_copy50.S compat__pw_copyx50.S \
 	compat__pw_getpwconf50.S compat__setusercontext50.S
 SRCS+=	${ASM}
+CLEANFILES+= ${ASM}
 
 .include "../generateasm.mk"